This application facilitates factory planning, operation control and preventive maintenance. All process tools and automation systems are inserted and hooked-up in the 5D environment. Since the exact tool locations and tool data are known, an analysis of the production capacity, cycle times, travel distances, stocker capacities, “what-if” scenario’s, etc, can be performed in order to optimize the factory planning.

The continuous measured tool data are linked to the real-time 5D model of the factory. As a result all measured data can be viewed by logging onto the 5D environment from any web-based location, walking through the factory and double clicking any tool. Bottle necks can be visualized in the 5D environment by dynamically changing colors and flows by dynamically changing streams.

Using the continuous measured data and preventive maintenance schedules, process tools requiring any kind of maintenance can be highlighted on time in the real time 5D environment. Double clicking the highlighted object will show the required actions.